Motion of precision linear bearings on nanometre scale

Liu's picture

A systematic characterization of the motion and friction of a linear bearing with rolling elements used for nanopositioning reveals an explicit distinction of static and rolling friction. The effects of operating parameters on the frictional behaviour and its possible utilization in the nanopositioning and nanomeasuring are discussed.


AttachmentSize
Motion_linear-ball-bearings.pdf512.95 KB