Strained multilayer structures are extensively investigated because of their applications in microelectromechanical/nano-elecromechanical systems. Here we employ a finite element method (FEM) to study the bending and twisting of multilayer structures subjected to misfit strains or residual stresses. This method is first validated by comparing the simulation results with analytic predictions for the bending radius of a bilayer strip with given misfit strains.
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