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# Nanowire; #MEMS; #Integration; #Semiconductor_Manufacturing; #CMOS_Compatibility

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Novel silicon nanowire-based 3-dimensional devices and systems

A new approach for monolithic integration of silicon nanowires with 3-dimensional devices (for more details of the project see:https://www.researchgate.net/project/Novel-silicon-nanowire-based-3-dime...). Integration of silicon nanowires in three-dimensional devices including integrated circuits (ICs) and microelectromechanical systems (MEMS) leads to enhanced functionality and performance in diverse applications.

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