Channeling cracks in low-k dielectrics have been observed to be a key reliability issue for advanced interconnects. The constraint effect of surrounding materials including stacked buffer layers has been studied. This paper analyzes the effect of interfacial delamination on the fracture condition of brittle thin films on elastic substrates. It is found that stable delamination along with the growth of a channel crack is possible only for a specific range of elastic mismatch and interface toughness. An effective energy release rate is defined to account for the influence of interfacial delamination on both the driving force and the fracture resistance, which can be significantly higher than the case assuming no delamination.

Y. Pang and R. Huang, J. Applied Physics 101, 023519 (2007).

Surface instability of epitaxial thin films leads to a variety of surface patterns. Anisotropy in surface and bulk properties has profound effects on the dynamics of pattern formation. In this study, we theoretically predict that, under anisotropic mismatch stresses, a bifurcation of surface pattern occurs in addition to generic symmetry breaking from isotropic systems. Numerical simulations based on a nonlinear evolution equation demonstrate pattern selection at an early stage and nontrivial patterns for long-time evolution.

Y. Pang and R. Huang, Physical Review B 74, 075413 (2006).

An epitaxial thin film can undergo surface instability and break up into discrete islands. The stress field and the interface interaction have profound effects on the dynamics of surface evolution. In this work, we develop a nonlinear evolution equation with a second-order approximation for the stress field and a nonlinear wetting potential for the interface. The equation is solved numerically in both two-dimensional (2D) and three-dimensional (3D) configurations using a spectral method. The effects of stress and wetting are examined. It is found that the nonlinear stress field alone induces "blow-up" instability, leading to crack-like grooving in 2D and circular pit-like morphology in 3D. For thin films, the blow-up is suppressed by the wetting effect, leading to a thin wetting layer and an array of discrete islands. The dynamics of island formation and coarsening over a large area is well captured by the interplay of the nonlinear stress field and the wetting effect.