Abstract:

As the thickness of coating thin
film is reduced it becomes increasingly difficult to measure their adhesion,
hardness, toughness by conventional methods. Indentation test methods are well
established for the determination of elastic modulus and hardness, but methods
for assessment of fracture properties are much less developed. In this term
paper, existing metrology of using indention to study fracture toughness will
be summarized and mechanics of fracture under indentation will be studied.
Experimental plans of investigation fracture toughness of OSG low-K film will
also be evaluated in the end.