Electro-Mechanical Analysis of MEMS Devices with CoventorWare and Abaqus

The computational analysis of MEMS (Micro Electro Me-chanical systems) devices poses distinctive challenges, requiring software that provides flexible modeling tools, enables the coupling of multiple physical phenomena, and considers the integration of the devices into their macro-scale surroundings. To meet these requirements, Abaqus partners with developers of commercially available MEMS software by providing the necessary finite element analy-sis capabilities to these packages.

Coventor is a market leader in MEMS design and analysis software. CoventorWare is an integrated suite that em-ploys Abaqus for structural, thermal, and piezoelectric analyses, as well as the structural component of coupled electromechanical and package analyses. In this technol-ogy brief two example electro-mechanical analyses of MEMS devices with CoventorWare and Abaqus are pre-sented.