Types of Impurities in single crystal semiconductor nanostructures

Hi,

I am looking for information about formation, distribution,
concentration and stability of impurties/ defect in semiconductors,
specifically for cubic SiC. I have some discrete set of
literartures which are neirther systematic, nor elaborate. I would truly
appricitate if any one can suggest me some references.

Sincerely,

-Ashfaq Adnan