Optical microscope for three-dimensional surface displacement and shape measurements at the microscale

We report a novel optical microscope for full-field, noncontact measurements of three-dimensional (3D) surface deformation and topography at the microscale. The microscope system is based on a seamless integration of the diffraction-assisted image correlation (DAIC) method with fluorescent microscopy. We experimentally demonstrate the microscope’s capability for 3D measurements with submicrometer spatial resolution and subpixel measurement accuracy.

http://xia.gatech.edu/Publication/3D%20Microscope_OpticsLetters14.pdf