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Overhang or under etch in cantilever resonantor structures

Accounting for the overhang (or under etch) in MEMS resonantor structures

Submitted by adiga on
research
Overhang or under etch in cantilever resonantor structures

Hi,

 

   I am wondering if there is a simple way to account for the overhang (or the under etch) in cantilever resonator structures when we are estimating for the resonant frequency of the  same. It will be a great help.

 

Thanks,

 

Vivek Adiga 

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