Nanoscale mechanics

Mechanically active single-crystal structures can now be fabricated with size scales of less than 100 nm in all three dimensions. These engineered structures have fundamental mechanical resonance frequencies approaching 1 GHz, with very little mechanical dissipation. Using such structures, we are developing a new class of devices with applications in electrometry, magnetometry, surface physics, and investigations of the physics of phononmediated processes. The methods used to fabricate these devices, combining electron-beam