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Effects of Composition and Thermal Annealing on the Mechanical Properties of Silicon Oxycarbide Films

Mon, 2012-08-27 21:45 - duping812

nanoindentation

residual stress

Stoney's equation

Sensors and Actuators A: Physical

Vol 176, Page 90-98.

http://dx.doi.org/10.1016/j.sna.2012.01.002

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