MEMS Doubly Clamped High Sensitivity Mass Detector
After reading the abstract on the resonanting cantilever mass detector, I think this paper might be of interest to some. My colleagues and I wrote this for a MEMS device class we took Fall 2005 at Columbia University while I was an undergraduate. It was a term design project.
Abstract – Micro-electromechanical systems (MEMS) often provide cost effective