research

Low dielectric constant (low-k) is achieved often at the cost of degraded mechanical properties, making it difficult to integrate the dielectric in the back end of line (BEOL) and to package low-k chips. Development of low-k technology becomes costly and time-consuming. Therefore, more frequently than before, people resort to modeling to understand mechanical issues and avoid failures. In this paper we present three multilevel patterned film models to examine channel cracking in low-k BEOL. The effects of copper features, caps and multilevel interconnects are investigated and their implications to BEOL fabrication are discussed.

Low-k BEOL Mechanical Modeling
Liu, Xiao Hu; Lane, Michael W; Shaw, Thomas M; Liniger, Eric G; Rosenberg, Robert R; Edelstein, Daniel C
Advanced Metallization Conference 2004 (AMC 2004); San Diego, CA and Tokyo; USa and Japan; 19-21 Oct. 2004 and 28-29 Sept. 2004. pp. 361-367. 2005

Experiments with a multidimensional nano-contact system (Lucas, Hay, and Oliver, J. Mater. Res. 2004) have shown that, prior to kinetic frictional sliding, there is a significant reduction of the tangential contact stiffness relative to the elastic prediction. The reduction occurs at contact sizes below about 50~200nm for aluminum single crystals and several other materials. Using a cohesive interface model, we find that this reduction corresponds to a transition from a small-scale-slip to large-scale-slip condition of the interface.

The effect of long-range (LR) elastic interactions on the toroidal moment of polarization in a two-dimensional ferroelectric particle is investigated using a phase field model. The phase field simulations exhibit vortex patterns with purely toroidal moments of polarization and negligible macroscopic polarization when the spontaneous strains are low and the simulated ferroelectric size is small. However, a monodomain structure with a zero toroidal moment of polarization is formed when the spontaneous strains are high in small simulated ferroelectrics, indicating that, because of the LR elastic interactions, high values of spontaneous strains hinder the formation of polarization vortices in ferroelectric particles. Applied Physics Letters 88, 182904 (2006)

I am pleased to announce that a new blolg associated with the International Journal of Fracture has been created by Springer. This is an ambitious project that aims to augment the published version of the papers and to create a dialogue between authors and readers. All articles beginning with the Dec 2004 issue now have a blog entry; ealier volumes will be added as digital processing of information continues. Discussion is not restricted to papers published in the journal, but should relate to the fracture/failure/structural integrity theme/micromechanics. Please see my post of Oct 25, 2006 for a detailed description of the obectives of the blog. I welcome your particpation in this experiment to enhance archival publication.

The effects of light propagation direction on the stress induced polarization dependence of silicon-based waveguide were studied. As silicon is an anisotropic material, the change of polarization dependence induced by the photoelastic effect depends on the light propagation directions. It is found that when the light propagates in <100> directions on {100} silicon, the changes of refractive index and polarization shift are about 20% more sensitive to the stress than those when the light propagates in <110> directions. (IEEE Photonic Technology Letters, vol. 18, No.

I thought I should take advantage of iMechanica and obtain feedback on some recent work that we did on nonlinear stability analysis of patterns.

A paradigmatic model that governs monolayer self-assembly was constructed a few years back by Wei Lu (Michigan) and Zhigang Suo. Apart from obtaining several physical insights they also conducted a linear stability analysis of their model. Borrowing technqiues from the nonlinear physics community, our work presents nonlinear stability analysis i.e. the initial state is no longer homogeneous and stable states beyond the transition are calculated. This allows a detailed construction of stability maps for various patterns without extensive numerical calculations.

This work is currently under review and I am attaching a pre-print with this post. Any comments and suggestions would be well-appreciated.

We propose a model of persistent step flow, emphasizing dominant kinetic processes and strain effects. Within this model, we construct a morphological phase diagram, delineating a regime of step flow from regimes of step bunching and island formation. In particular, we predict the existence of concurrent step bunching and island formation, a new growth mode that competes with step flow for phase space, and show that the deposition flux and temperature must be chosen within a window in order to achieve persistent step flow. The model rationalizes the diverse growth modes observed in pulsed laser deposition of SrRuO₃ on SrTiO₃

 Physical Review Letters 95, 095501 (2005)

Snoring is defined as sounds made by vibrations in the soft palate and their adjacent tissues during sleep. Heavy snoring can result in sleep-related upper airway narrowing, which leads to respiratory flow limitation and increased respiratory effort. If untreated, heavy snoring may be complicated by excessive daytime sleepiness. Hence, snoring has received a great deal of clinical attention in recent years.

The nanotechnology of the future demands controlled fabrication of nanostructures. Much success has been made in the last decade in fabricating nanostructures on surface with desirable size and shape, either in serial using scanned-probe techniques or in parallel using self-assembly/self-organization processes sometimes combined with lithographic patterning techniques. However, controlled fabrication of nanostructures remains in general a formidable challenge. For example, despite the enormous success we have so far enjoyed with carbon nanotubes (CNTs), it is still very difficult (if not impossible) to synthesize CNTs with a degree of control that we would like in terms of their size and chirality. Fabrication of nanostructures in many other forms and with other materials is even less developed. There exists a strong need for the development of nanofabrication techniques with higher degree of control. Here, we demonstrate the general design principles of an emerging nanofabrication approach based on nanomechanical architecture of strained bi-layer thin films, which allows fabrication of a variety of nanostructures, such as nanotubes, nanorings, nanodrills, and nanocoils, with an unprecedented level of control.