Abhishek Arora, Rajat Arora, Amit Acharya
http://dx.doi.org/10.1615/IntJMultCompEng.2018026027
Abstract
Journal of Microelectromechanical Systems Ping Du; Chen Cheng; Hongbing Lu; Xin Zhang Volume: 22, Issue: 1, Page(s): 44 - 53 DOI: 10.1109/JMEMS.2012.2213070
Applied Physics Letters 99(8): 083701.
http://link.aip.org/link/doi/10.1063/1.3628456
Journal of Micromechanics and Microengineering
Volume 20, Number 9, 095016
http://dx.doi.org/10.1088/0960-1317/20/9/095016
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