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Rui Huang's picture

Thin films: wrinkling vs buckle-delamination

H. Mei, J.Y. Chung, H.-H. Yu, C.M. Stafford, and R. Huang, Buckling modes of elastic thin films on elastic substrates. Applied Physics Letters 90, 151902 (2007).

Two modes of thin film buckling are commonly observed, one with interface delamination (e.g., telephone cord blisters) and the other with no delamination (i.e., wrinkling). Which one would occur for your film?

Andrew Norris's picture

Stephen H. Davis

Intergranular fracture

Microcracks form by a mixture of local thinning and intergranular fracture in a 170-nm-thick Cu film that is well bonded to a polyimide substrate and is stretched to a strain of 30%. Details can be found in this paper. A related forum topic can be found

High ductility of a metal film adherent on a polymer substrate

In recent development of deformable electronics, it has been noticed that thin metal films often rupture at small tensile strains. Here we report experiments with Cu films deposited on polymeric substrates, and show that the rupture strains of the metal films are sensitive to their adhesion to the substrates. Well-bonded Cu films can sustain strains up to 10% without appreciable cracks, and up to 30% with discontinuous microcracks. By contrast, poorly bonded Cu films form channel cracks at strains about 2%. The cracks form by a mixture of strain localization and intergranular fracture.

EM 397 Term Paper: Stress-Induced Voiding in Dual-Damascene Cu Interconnects

Stress-induced voiding (SIV) is investigated in Cu-based, deep-submicron, dual damascene technology. Two failure modes are revealed by TEM failure analysis. For one mode, voids are formed under the via when the via connects a wide metal lead below it. For the via which is instead under a wide metal line, voids are formed right above the via bottom. The void source results from the supersaturated vacancies which develop when Cu is not properly annealed after electroplating and before being constrained by dielectrics. The driving force comes from the stress built up due to grain growth and the thermal expansion mismatch (CTE) between Cu interconnect and dielectrics. A diffusion model is introduced to investigate the voiding mechanism primarily for the vias connected to wide metal leads.

EM 397 Term Paper: Dislocations in Epitaxial Thin Films

Dislocations are common in epitaxial systems. For a thin film epitaxially grown on a substrate with coherent interface, it may have spontaneously-formed dislocations when its thickness is larger than certain value, i.e. critical thickness. The presence of dislocations can have an adverse effect on electrical performance of semiconductor materials, providing easy diffusion paths for dopants to lead to short circuits, or recombination centers to reduce carrier density. And, formation of dislocations is one of the most observed mechanisms of relaxation of mismatch strain. However, in optoelectric applications, strain alters the electronic bandgap and band edge alignment, and should be maintained. So, controlling formation of dislocations is very important in the manufacture of microelectronic and optoelectronic devices.

This term paper will review some basic concepts and try to produce some understanding about the control dislocation formation.

EM 397 Term Paper: Channeling crack of low-k dielectric films

Today low-k dielectric materials are integrated into computer chips to improve the operation speed and reduce the cross-talk noise. Due to weak mechanical properties of low-k dielectric materials, cohesive failure is subjected to occur. Channel cracking is one common mode of cohesive failure. In this term paper, several potential issues relevant to channel cracking of low-k dielectric thin films are reviewed.

Haixia Mei's picture

EM 397 Term Paper: Effects of Substrate Compliance on Buckling Delamination of Thin Films under Compression

For films or coatings deposited on substrate at high temperature, residual compressive stresses are often induced in the surface layers because of the mismatch in the thermal expansion coefficients. Under such compressive residual stresses, the surface thin film is susceptible to buckling-driven delamination. Various shapes of buckled region are observed, including long straight-sided blisters, circular and the ‘telephone cord’ blister.

Rui Huang's picture

EM 397 Thin Film Mechanics Term Paper

Each student completes a term paper of selected topics that (a) addresses a phenomenon in thin film materials, and (b) involves analyses using mechanics. The project contributes 25% of the grade, distributed as follows:

  • 5%: November 30 (Thursday). Post your title and abstract in iMechanica, formated as below
  1. Title (EM 397 Term Paper: e.g., Dislocations in Epitaxial Thin Films).
  2. Tags (EM 397, Fall 2006, University of Texas at Austin, thin films, term paper)
  3. Body: (i) Describe the phenomenon. (ii) Explain how mechanics is relevant. (iii) Cite at least 1 journal article.
  • 10%: December 12 Tuesday (2:00-4:00 pm). 30 minute presentation. Use power point slides.
  • 10%: December 18 Monday.
Joost Vlassak's picture

Plastic deformation of freestanding thin films: Experiments and modeling

This is a paper we recently published in JMPS on a study of the mechanical properties on thin films comparing experimental results with discrete dislocation simulations. It provides insight in the strengthening that occurs in thin metal films when surface or interface effects become important.

The abstract is below; the full paper can be downloaded from here

Abstract - Experimental measurements and computational results for the evolution of plastic deformation in freestanding thin films are compared. In the experiments, the stress–strain response of two sets of Cu films is determined in the plane-strain bulge test. One set of samples consists of electroplated Cu films, while the other set is sputter-deposited. Unpassivated films, films passivated on one side and films passivated on both sides are considered. The calculations are carried out within a two-dimensional plane strain framework with the dislocations modeled as line singularities in an isotropic elastic solid. The film is modeled by a unit cell consisting of eight grains, each of which has three slip systems. The film is initially free of dislocations which then nucleate from a specified distribution of Frank–Read sources. The grain boundaries and any film-passivation layer interfaces are taken to be impenetrable to dislocations. Both the experiments and the computations show: (i) a flow strength for the passivated films that is greater than for the unpassivated films and (ii) hysteresis and a Bauschinger effect that increases with increasing pre-strain for passivated films, while for unpassivated films hysteresis and a Bauschinger effect are small or absent. Furthermore, the experimental measurements and computational results for the 0.2% offset yield strength stress, and the evolution of hysteresis and of the Bauschinger effect are in good quantitative agreement.

Dhirendra Kubair's picture

Finite element simulations of microvoid growth due to selective oxidation in binary alloys.

Selective oxidation induced void growth is observed in thermal barrier coating (TBC) systems used in gas turbines. These voids occur at the interface between the bond coat and the thermally grown oxide layer. In this article we develop the modeling framework to simulate microvoid growth due to coupled diffusion and creeping in binary alloys. We have implemented the modeling framework into an existing finite element program. The developed modeling framework and program is used to simulate microvoid growth driven by selective oxidation in a binary beta-NiAl alloy. Axisymmetric void growth due to the combined action of interdiffusion and creeping is simulated. The sharpness of the void and direction of creeping are considered as parameters in our study. Our simulations show that the voids dilate without any change in shape when creeping is equally likely in all the directions (isotropic). Void growth patterns similar to those observed in experiments are predicted when the creeping is restricted to occur only along the radial and tangential directions. A hemispherical void grows faster compared to a sharp void. The sharpness increases in the case of a sharp void and could lead to interactions with the neighboring voids leading to spallation of the thermally grown oxide layer as observed in experiments.

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