multilayer

Dear colleagues,

The reaction of Zr/B multilayers with a 50 nm modulation period has been studied using scanning AC nanocalorimetry at a heating rate of approximately 1,000 K/s. We describe a data reduction algorithm to determine the rate of heat released from the multilayer. Two different exothermic peaks are identified in the nanocalorimetry signal: a shallow peak at low temperature (200 - 650°C) and a sharp peak at elevated temperature (650 - 800°C).

Sensors and Actuators A: Physical

Volume 163, Issue 1, September 2010, Pages 240–246

http://dx.doi.org/10.1016/j.sna.2010.06.002

A free surface in a multi-layer can experience an undulation due to surface diffusion during fabrication or etching process. In order to analyze the undulation, the elasticity solution for the undulating film is needed. Considering the undulation as a perturbation of a flat surface, a boundary value problem for 2D elasticity is formulated. The solution procedure is straightforward, but very lengthy especially for a multi-layer.